First Place Machinery


Tencor P2 Long Scan Profiler

Equipment Description 
Specifications are from KLA-Tencor and may vary slightly due to upgrades, options, or revisions this unit may or may not have.

Model Number: 148679
Serial Number: 12910152
Description: P-2
Power Requirements: 115 V, 4 A, Single Phase, 60 Hz

The Tencor P-2 Long Scan Profiler is a computerized, high-sensitivity surface profiler that measures roughness, waviness, and step height in a variety of applications. It features the ability to measure micro-roughness with a 1 Å resolution over short distances as well as a waviness over a full, 210-mm (8.2-in) scan. The built-in PC/AT computing power offers precise, automatic measurement capability, data storage, and data analysis.

The Tencor P-2 can profile a variety of materials, including:

  • Magnetic disks
  • Semiconductor wafers
  • Precision-machined and polished surfaces
  • Ceramics for micro-electronics
  • Glass for flat panel displays
  • Optical surfaces
  • Features:

  • Measurement of vertical features ranging from under 100 Å (0.4 µin) to approximately 0.3 mm (11 mils), with a vertical resolution of 1 or 25 Å (0.004 or 0.1 µin). Measurements can be taken in either metric or English units, which are selectable independently for horizontal and vertical parameters.
  • Up to 5000 data points per profile guarantee that the horizontal resolution is generally limited by the stylus radius and not by the number of data points.
  • Measurement of many roughness and waviness parameters with roughness and waviness separated by user-selectable cutoff filters. A band pass filter allows the separation of intermediate wavelengths.
  • Ability to fit and level data, allowing accurate measurements on curved surfaces.
  • Ability to detect the edge or apex of a profile artifact, allowing precise comparison of data measured on similar samples.
  • Ability to segment a length into multiple scans as in the OD-to-OD profile of a disk with a center hole.
  • Ability to repeat a scan up to ten times and automatically calculate the average, thereby minimizing the effects of environmental noise on measurements.
  • Ability to execute a sequence of up to 300 scans automatically with the Sequence Option.
  • Automatic positioning on the sample surface to within a few microns in X, Y, or rotation (motorized rotation is an optional feature).
  • Precision mode, allowing precise location of small features and deskew coordinates for automatic operation.
  • Built-in, 80386-based PC/AT controller with 40 MB of disk storage.
  • Comprehensive database manager and the ability to export the data in a form that is compatible with Lotus 1-2-3 and other commercial programs. (This option is available for the Automatic Long Scan Profiler only.)
  • Many ease-of-use features, including programmable stylus force, trackball control of measurement cursors and stage position, color screens with pull-down menus and pop-up windows.
  • Accommodation of samples up to 355 mm (14 in) wide, 57.2 mm (2.25 in) thick, and 5 lb (2.2 kg) in weight with the normal configuration.
  • Ability to limit operator access by means of a keylock (I do not have the key).
  • Sequence/Database Manager Option:
    The Sequence/Database Manager Option consists of the Sequence and Database Manager software. This option included in the Automatic Long Scan Profiler. The option provides the following:

  • Sequence software that enables a user to combine up to 300 recipes and artifact locations into a sequence. The complete sequence can then be run with or without operator intervention.
  • Database Manager software that enables data to be saved with up to seven identifiers and later manipulated using the identifiers and time brackets.
  • Buyer is responsible for all shipping charges from our Boston, MA location.

    Price: $8,000 USD

    KLA Tencor P-2

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