Busch Dry Screw Pump
Just taken offline in Good Running Condition!
Equipment Description Busch Model Number: BC 0100A Serial Number: C10360000149 Year 2010 200/230 VAC - 3 Phase - 60 HZ CE Marked
Applications: - Load lock
- Transfer
- Buffer
- Metrology
- Lithography
- PVD
- Preclean
- Implant Source
- RTA
- Strip / Ashing
- Oxide Etch
- Silicon Etch
Technical Data: - Nominal Displacement: 130 m3/h
- Ultimate Pressure: 0.01 hPa (mbar)
- Nominal Motor Rating: 1.8 kW
Features: - Reduced Footprint
- Field Proven Dry Screw Technology
- Reduced Facility Consumptions
- Process Tool Integration
- Low Noise / Vibration Levels
- Reduced Foreline Installation
- Clean Room Compatible
- No Cooling Water or N2 Supply Line
More information can be found at the following link: http://www.buschsvg.com/fileadmin/PDFs/Products/COBRA/COBRA_BOB_BC_100_1000.pdf Location: Boston, MA
Price: $13,800 USD | Busch Screw Pump
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