logo

Busch Dry Screw Pump

Just taken offline in Good Running Condition!

Equipment Description 

Busch

Model Number: BC 0100A

Serial Number: C10360000149

Year 2010

200/230 VAC - 3 Phase - 60 HZ CE Marked


Applications:

  • Load lock
  • Transfer
  • Buffer
  • Metrology
  • Lithography
  • PVD
  • Preclean
  • Implant Source
  • RTA
  • Strip / Ashing
  • Oxide Etch
  • Silicon Etch


Technical Data:

  • Nominal Displacement: 130 m3/h
  • Ultimate Pressure: 0.01 hPa (mbar)
  • Nominal Motor Rating: 1.8 kW


Features:

  • Reduced Footprint
  • Field Proven Dry Screw Technology
  • Reduced Facility Consumptions
  • Process Tool Integration
  • Low Noise / Vibration Levels
  • Reduced Foreline Installation
  • Clean Room Compatible
  • No Cooling Water or N2 Supply Line



More information can be found at the following link:


http://www.buschsvg.com/fileadmin/PDFs/Products/COBRA/COBRA_BOB_BC_100_1000.pdf



Location: Boston, MA

Price: $13,800 USD

Busch Screw Pump

See more photos below

Share by: