MRSI Automatic Dispensing System

Model 170

Year 8/1997

PC compatible

Program interrupt & resume

Positive Displacement head with cleaning shape dispense capabilities (lines, dots, rectangles, circles).
High speed z stage

Vacuum base plate

Vertical ccd video camera

Ring light

Pad & surface mapping

MRSI vision system

Automatic substrate & pattern alignment

Verification alignment

Sub-global parameters

Price: $15,000