Busch Dry Screw Pump

Just taken offline in Good Running Condition!

Equipment Description 

Busch

Model Number: BC 0100A

Serial Number: C10360000149

Year 2010

200/230 VAC - 3 Phase - 60 HZ CE Marked

Applications:

• Load lock
• Transfer
• Buffer
• Metrology
• Lithography
• PVD
• Preclean
• Implant Source
• RTA
• Strip / Ashing
• Oxide Etch
• Silicon Etch

Technical Data:

• Nominal Displacement: 130 m3/h
• Ultimate Pressure: 0.01 hPa (mbar)
• Nominal Motor Rating: 1.8 kW

Features:

• Reduced Footprint
• Field Proven Dry Screw Technology
• Reduced Facility Consumptions
• Process Tool Integration
• Low Noise / Vibration Levels
• Reduced Foreline Installation
• Clean Room Compatible
• No Cooling Water or N2 Supply Line

More information can be found at the following link:

http://www.buschsvg.com/fileadmin/PDFs/Products/COBRA/COBRA_BOB_BC_100_1000.pdf



Location: Boston, MA

Price: $13,800 USD