Entrepix DSS 200 - Post CMP Wafer Scrubber

Item is in New Condition 

Purchased for $450,000 and never set up 

Equipment Description

• Entrepix
• Type: Wafer Scrubber
• Model Number: DSS-200 
• Year: April 2022
• Wafer Configuration: 100mm or 150mm or 200mm 
• Double Side Scrubber
• Through the brush chemical dispense in each brush box
• I/O addressing
• Upgraded drive and stepper motor controls 
• Windows 7 O/S
• Color Touch Screen Flat Panel Display
• Process parameter flexibility is maintained in a controlled and repeatable manner through system software
• Factory Mutual FM4910 approved plastics utilized for major assemblies
• Molded Spin Sink (SRD)
• Improved DI\Chemical Dispense Module.
• 5-Finger Wafer Gripper Standard
• Universal Lifter Tip / 100-200mm, 600,800,1000,1200 Micron thickness options
• Consistent w/ Legacy consumables
• 220VAC UL Listed
• CE marked electrical enclosure
• Location: Boston, MA

Price: $300,000

Entrepix DSS 200 Wafer Scrubber

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